• Precision motorized stage for applications requiring automation and ergonomics
• Joystick and programmable software control
• DC servo motors and rotary encoders in closed-loop system for guaranteed positioning or microstepping motors in open-loop system 
• Thin cross-section (0.96- 1.48") allows stage to easily adapt to most microscopes
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flatness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Linear accuracy is laser calibrated to less than 1 micron error in 3000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000
• Repeatability within 2 microns
• Precision stainless steel ACME lead screws provide fine resolution of 2 mm per revolution
• Single piece hardened steel bearing slides use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
   

PART # DESCRIPTION 142-468.75 KL46 Motor Stage, 4.6x2.3 X-Y, 1um encoders 15 mm/sec, Transmitted 90mm diam. w/Glass Insert 142-468.77 KL46 Motor Stage, 4.6x2.3 X-Y, 0.16um steps 20 mm/sec, Transmitted 90mm diam. w/Glass Insert 142-648.7# KL64 Motor Stage, 6x4 X-Y, Transmitted w/ Glass Insert 142-649.7# KL64 Motor Stage, 6x4 X-Y, Reflected Light 142-668.7# KL66 Motor Stage, 6x6 X-Y, Transmitted w/ Glass Insert 142-669.7# KL66 Motor Stage, 6x6 X-Y, Reflected Light 142-888.7# KL88 Motor Stage, 8x8 X-Y, Transmitted w/ Glass Insert 142-889.7# KL88 Motor Stage, 8x8 X-Y, Reflected Light 142-928.7# KL300 Motor Stage, 12x10 X-Y, Transmitted w/ Glass Insert 142-929.7# KL300 Motor Stage, 12x12 X-Y, Reflected Light  ORDERING INFORMATION 1) A microscope stage mount MUST be specified (see Mounting);or Custom Base ordered; otherwise D102 Hole Pattern will be provided. 2) For motor type type, please specify # as:      5 = Advanced DC Servo, 0.5um encoders 75 mm/sec                                          (1um encoders, 15mm/sec for KL46)      7 = Stepper, 0.08um steps, 35 mm/sec                                          (0.08um steps, 20mm/sec for KL46) 3) See Controllers and Software. 4) See Mask & Wafer Inspection Accessories  DIMENSIONAL SPECIFICATIONS

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