K-Series Measuring Stages

 

K88 Measuring Stage with Rotating Wafer Puck

  • High quality stage for manual measuring applications with 1 micron encoder resolution
  • Thin cross-section (0.96- 1.48") allows stage to easily adapt to most microscopes including Leica, Mitutoyo, Nikon, Olympus, and Zeiss
  • Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
  • Linear accuracy is laser calibrated to less than 1micron error in 5000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000
  • Repeatability within 2 microns
  • Unique hardened steel friction drive for backlash-free operation outlasts rack and pinion systems
  • Bearing slides made from single piece hardened steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
  • Basic and metrology digital readouts available

Also see K-Series Non-Measuring Microscope Stage
 

PART #

DESCRIPTION

12-6410.5#

K64 Stage, 6x4 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert

12-6412.5#

K64 Stage, 6x4 X-Y, 0.5um resolution, Reflected Light

12-6610.5#

K66 Stage, 6x6 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert

12-6612.5#

K66 Stage, 6x6 X-Y, 0.5um resolution, Reflected Light

12-8810.5#

K88 Stage, 8x8 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert

12-8812.5#

K88 Stage, 8x8 X-Y, 0.5um resolution, Reflected Light

12-1210.5#

K300 Stage, 12x10 X-Y, 0.5um resolution, Transm. Light w/Glass Insert

12-1212.5#

K300 Stage, 12x12 X-Y, 0.5um resolution, Reflected Light

 ORDERING INFORMATION

    1) A microscope stage mount MUST be specified (see Mounting), otherwise D102 Hole Pattern will be provided.

    2) For knob style, please specify # as:
         0 = Small 1.5" diam, Short 1.5"  (Standard)
         1 = Small 1.5" diam, Long 2.5"
         2 = Large 2.25" diam, Short 1.5"
         3 = Large 2.25" diam, Long 2.5"

    3) Order a Digital Readout.

    4) See Mask & Wafer Inspection Accessories

  DIMENSIONAL SPECIFICATIONS

 


Note:
Stage Dimensions
are without
Linear Encoders.

 

 

 


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