Mask & Wafer Inspection Accessories

 

  • Holders support masks on outer edge preventing damage to sensitive surfaces
  • Includes cutouts for edge-grip tools, allowing easy placement and removal of masks

Rotating Wafer Puck Paddle

Mask Paddle

  • Multiple holders are easily interchangeable on one stage using paddle guide set
  • For use with Semprex X-Y stages (each stage must be equipped with a paddle guide set)

PART #

DESCRIPTION

 FOR 4" STAGES

13-4014.00

M4 Paddle Guide Set, Front Load  (Not Available for Motor or Leadscrew Stages)

13-4015.00

M4 Paddle Guide Set, Side Load

13-40##.00

M4 Mask Paddle

13-4033.00

M4 Wafer Paddle, 4 Wafers

13-4233.00

M4 Rotating Puck Paddle, 4 Wafers

13-4243.02

M4 Rot. Vacuum Puck Pad. w/Valve & Hose, 2-4 Wafers

 FOR 6" STAGES

13-6014.00

M6 Paddle Guide Set, Front Load  (Not Available for Motor or Leadscrew Stages)

13-6015.00

M6 Paddle Guide Set, Side Load

13-60##.00

M6 Mask Paddle

13-60nn.00

M6 Wafer Paddle

13-62nn.00

M6 Rotating Wafer Puck Paddle

13-6245.02

M6 Rot. Vacuum Puck Pad. w/Valve& Hose, 4-6 Wafers

13-2031.02

Vacuum Chuck w/Valve & Hose, Knob Rotation., 4-6 Wafers

 FOR 8" STAGES

13-8014.00

M8 Paddle Guide Set, Front Load  (Not Available for Motor or Leadscrew Stages)

13-8015.00

M8 Paddle Guide Set, Side Load (Reflected Stages)

13-8015.10

M8 Paddle Guide Set, Side Load (Transmitted Stages)

13-80##.00

M8 Mask Paddle

13-80nn.00

M8 Wafer Paddle

13-82nn.00

M8 Rotating Wafer Puck Paddle

13-8246.02

M8 Rot. Vacuum Puck Paddle. w/Valve & Hose, 5-8 Wafers

13-2041.02

Vacuum Chuck w/Valve & Hose, Knob Rotation., 5-8 Wafers

 FOR 12" STAGES

13-1214.00

M300 Paddle Guide Set, Front Load

13-1248.02

M300 Rototating Vacuum Puck Paddle. w/ Valve & Hose, 8-12 Wafers

 ADDITIONAL ATTACHMENTS

13-0021.02

Add-on 2 Wafer Guide on 4 Puck

13-0021.03

Add-on 3 Wafer Guide on 4 Puck

13-0021.04

Add-on 4 Wafer Guide on 6 Puck

13-0021.05

Add-on 5 Wafer Guide on 6 Puck

13-0041.05

Add-on 5 Wafer Guide on 8 Puck

13-0041.06

Add-on 6 Wafer Guide on 8 Puck

13-0041.08

Add-on 8 Wafer Guide on 12 Puck

13-1468.00

Paddle Alignment Stop (mounts on stage )

 ORDERING INFORMATION

    1) For mask size, please specify ## as:
           17 = 2.5 (M4- M8) 20 = 4 (M4-M8)
           21 = 4.5 (M6- M8) 22 = 5 (M6-M8)
           24 = 6 (M6-M8) 26 = 7 (M8)

    2) For wafer/puck size, please specify nn as:
           33 = 4 (M4-M8)
           35 = 6 (M6-M8)
           36 = 8 (M8)

    3) Order one paddle guide with one or more paddles per stage.

    4) Vacuum Chuck mounts directly to stage top plate and
         includes precision rotation knob.
     

 

 


    
 

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