Holders support masks on outer edge preventing damage to sensitive surfaces Includes cutouts for edge-grip tools, allowing easy placement and removal of masks Multiple holders are easily interchangeable on one stage using paddle guide set For use with Semprex X-Y stages (each stage must be equipped with a paddle guide set)

PART # DESCRIPTION  FOR 4" STAGES 13-4014.00 M4 Paddle Guide Set, Front Load  (Not Available for Motor or Leadscrew Stages) 13-4015.00 M4 Paddle Guide Set, Side Load 13-40##.00 M4 Mask Paddle 13-4033.00 M4 Wafer Paddle, 4 Wafers 13-4233.00 M4 Rotating Puck Paddle, 4 Wafers 13-4243.02 M4 Rot. Vacuum Puck Pad. w/Valve & Hose, 2-4 Wafers  FOR 6" STAGES 13-6014.00 M6 Paddle Guide Set, Front Load  (Not Available for Motor or Leadscrew Stages) 13-6015.00 M6 Paddle Guide Set, Side Load 13-60##.00 M6 Mask Paddle 13-60nn.00 M6 Wafer Paddle 13-62nn.00 M6 Rotating Wafer Puck Paddle 13-6245.02 M6 Rot. Vacuum Puck Pad. w/Valve& Hose, 4-6 Wafers 13-2031.02 Vacuum Chuck w/Valve & Hose, Knob Rotation., 4-6 Wafers  FOR 8" STAGES 13-8014.00 M8 Paddle Guide Set, Front Load  (Not Available for Motor or Leadscrew Stages) 13-8015.00 M8 Paddle Guide Set, Side Load (Reflected Stages) 13-8015.10 M8 Paddle Guide Set, Side Load (Transmitted Stages) 13-80##.00 M8 Mask Paddle 13-80nn.00 M8 Wafer Paddle 13-82nn.00 M8 Rotating Wafer Puck Paddle 13-8246.02 M8 Rot. Vacuum Puck Paddle. w/Valve & Hose, 5-8 Wafers 13-2041.02 Vacuum Chuck w/Valve & Hose, Knob Rotation., 5-8 Wafers  FOR 12" STAGES 13-1214.00 M300 Paddle Guide Set, Front Load 13-1248.02 M300 Rototating Vacuum Puck Paddle. w/ Valve & Hose, 8-12 Wafers  ADDITIONAL ATTACHMENTS 13-0021.02 Add-on 2 Wafer Guide on 4 Puck 13-0021.03 Add-on 3 Wafer Guide on 4 Puck 13-0021.04 Add-on 4 Wafer Guide on 6 Puck 13-0021.05 Add-on 5 Wafer Guide on 6 Puck 13-0041.05 Add-on 5 Wafer Guide on 8 Puck 13-0041.06 Add-on 6 Wafer Guide on 8 Puck 13-0041.08 Add-on 8 Wafer Guide on 12 Puck 13-1468.00 Paddle Alignment Stop (mounts on stage )  ORDERING INFORMATION 1) For mask size, please specify ## as:        17 = 2.5 (M4- M8) 20 = 4 (M4-M8)        21 = 4.5 (M6- M8) 22 = 5 (M6-M8)        24 = 6 (M6-M8) 26 = 7 (M8) 2) For wafer/puck size, please specify nn as:        33 = 4 (M4-M8)        35 = 6 (M6-M8)        36 = 8 (M8) 3) Order one paddle guide with one or more paddles per stage. 4) Vacuum Chuck mounts directly to stage top plate and      includes precision rotation knob.