|
PART # |
DESCRIPTION |
|
FOR 4" STAGES |
|
13-4015.00 |
M4 Paddle Guide Set |
|
13-40##.00 |
M4 Mask Paddle |
|
13-403n.00 |
M4 Wafer Paddle |
|
13-423n.00 |
M4 Rotating Wafer Puck Paddle |
|
13-424n.02 |
M4 Rot. Vacuum Wafer Puck Pad. w/Valve &
Hose |
|
FOR 6" STAGES |
|
13-6015.00 |
M6 Paddle Guide Set |
|
13-60##.00 |
M6 Mask Paddle |
|
13-603n.00 |
M6 Wafer Paddle |
|
13-623n.00 |
M6 Rotating Wafer Puck Paddle |
|
13-624n.02 |
M6 Rot. Vacuum Wafer Puck Pad. w/Valve&
Hose |
|
FOR 8" STAGES |
|
13-8015.00 |
M8 Paddle Guide Set |
|
13-8015.10 |
M8 Paddle Guide Set, Side Load for Transmitted
Stages |
|
13-80##.00 |
M8 Mask Paddle |
|
13-803n.00 |
M8 Wafer Paddle |
|
13-823n.00 |
M8 Rotating Wafer Puck Paddle |
|
13-824n.02 |
M8 Rot. Vacuum Wafer Puck Pad. w/Valve &
Hose |
|
FOR 12" STAGES |
|
13-1215.00 |
M300 Paddle Guide Set |
|
13-12##.00 |
M300 Mask Paddle |
|
13-1228.00 |
M300 Mask Paddle, 9 inch Masks |
|
13-123n.00 |
M300 Wafer Paddle |
|
13-124n.02 |
M300 Rototating Vacuum Wafer Puck Paddle. w/
Valve & Hose |
|
ADDITIONAL
ATTACHMENTS |
|
13-0021.02 |
Add-on 2 inch Wafer Guide on 4 inch
Puck |
|
13-0021.03 |
Add-on 3 inch Wafer Guide on 4 inch
Puck |
|
13-0021.04 |
Add-on 4 inch Wafer Guide on 6 inch
Puck |
|
13-0021.05 |
Add-on 5 inch Wafer Guide on 6 inch
Puck |
|
13-0041.05 |
Add-on 5 inch Wafer Guide on 8 inch
Puck |
|
13-0041.06 |
Add-on 6 inch Wafer Guide on 8 inch
Puck |
|
13-0041.08 |
Add-on 8 inch Wafer Guide on 12 inch
Puck |
|
13-1468.00 |
Paddle Alignment Stop
(mounts on stage ) |
|
ORDERING
INFORMATION |
1) For mask size, please specify ##
as:
17 = 2.5 inch
(M4-M300) 20 = 4 inch (M4-M300)
21 = 4.5 inch
(M6-M300) 22 = 5 inch
(M6-M300)
24 = 6
inch (M6-M300) 26 = 7
inch (M8-M300)
2) For wafer/puck size, please
specify n
as:
3 =
4 inch
(M4-M300)
5 = 6 inch
(M6-M300)
6 = 8 inch
(M8-M300)
8 = 12 inch (M300)
3) Order one paddle guide with one or
more paddles per stage.
4) Vacuum Chuck mounts directly to stage
top plate and
includes
precision rotation
knob.
| |
