Holders support masks on outer edge preventing damage to sensitive surfaces Includes cutouts for edge-grip tools, allowing easy placement and removal of masks Multiple holders are easily interchangeable on one stage using paddle guide set For use with Semprex X-Y stages (each stage must be equipped with a paddle guide set)

PART # DESCRIPTION  FOR 4" STAGES 142-240-00 M4 Paddle Guide Set 13-40##.00 M4 Mask Paddle 102-094-00 M4 Wafer Paddle, 3 inch & 4 inch 142-242-3n M4 Rotating Wafer Puck Paddle 142-242-4n M4 Rot. Vacuum Wafer Puck Pad. w/Valve & Hose  FOR 6" STAGES 142-260-00 M6 Paddle Guide Set 13-60##.00 M6 Mask Paddle 128-052-00 M6 Wafer Paddle, 5 inch & 6 inch 142-262-3n M6 Rotating Wafer Puck Paddle 142-262-4n M6 Rot. Vacuum Wafer Puck Pad. w/Valve& Hose  FOR 8" STAGES 142-280-00 M8 Paddle Guide Set 142-280-10 M8 Paddle Guide Set, Side Load for Transmitted Stages 13-80##.00 M8 Mask Paddle 142-282-08 M8 Wafer Paddle, 6 inch & 8 inch 142-282-3n M8 Rotating Wafer Puck Paddle 142-282-4n M8 Rot. Vacuum Wafer Puck Pad. w/Valve & Hose  FOR 12" STAGES 142-290-00 M300 Paddle Guide Set 142-292-09 M300 Wafer Paddle, 8 inch & 12 inch 142-292-3n M300 Rotating Wafer Puck Paddle 142-292-4n M300 Rototating Vacuum Wafer Puck Paddle. w/ Valve & Hose  ADDITIONAL ATTACHMENTS 142-240-02 Add-on 2 inch Wafer Guide on 4 inch Puck 142-240-03 Add-on 3 inch Wafer Guide on 4 inch Puck 142-260-04 Add-on 4 inch Wafer Guide on 6 inch Puck 142-260-05 Add-on 5 inch Wafer Guide on 6 inch Puck 142-280-05 Add-on 5 inch Wafer Guide on 8 inch Puck 142-280-06 Add-on 6 inch Wafer Guide on 8 inch Puck 142-290-08 Add-on 8 inch Wafer Guide on 12 inch Puck 102-387-00 Paddle Alignment Stop (mounts on stage )  ORDERING INFORMATION 1) For mask size, please specify ## as:        17 = 2.5 inch (M4,M6,M8)   18 = 3 inch (M4,M6,M8)        19 = 3.5 inch (M4,M6)          20 = 4 inch (M4,M8)        22 = 5 inch (M6,M8)             24 = 6 inch (M6,M8)        26 = 7 inch (M8) 2) For wafer puck size, please specify n as:        4 = 3 inch & 4 inch (M4,M6)        6 = 5 inch & 6 inch (M4,M6,M8)        8 = 6 inch & 8 inch (M6,M8,M300)        9 = 8inch & 12inch (M300) 3) Order one paddle guide with one or more paddles per stage. 4) Vacuum Chuck mounts directly to stage top plate and      includes precision rotation knob.